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Action: 0 of 37 selected

5 Name	category	3 operation mode	7 ID
Oxford Silicon Etcher	Dry Etch	Regular	135
PDMS Curing Oven 1	Soft Lithography	Regular	73
PDMS Curing Oven 2	Soft Lithography	Regular	77
PDMS Mixer	Soft Lithography	Regular	71
PDMS Plasma Bonder	Soft Lithography	Regular	72
PDMS Puncher	Soft Lithography	Regular	74
PDMS Spin Coater	Soft Lithography	Regular	70
PECVD	Chemical Vapor Deposition	Regular	2
Parametric Test	Metrology	Regular	47
Parylene Deposition	Physical Vapor Deposition	Regular	34
RHL Tube 1 Oxide	Furnaces	Regular	90
RHL Tube 2 Anneal	Furnaces	Regular	91
RHL Tube 3 Nitride	Furnaces	Regular	92
RHL Tube 4 Poly	Furnaces	Regular	93
SPTS Deep Si Etch	Dry Etch	Regular	58
SPTS HF Vapor Etcher	Wet Chemistry	Regular	55
SSEC Piranha 1	Wet Chemistry	Regular	79
SSEC RCA	Wet Chemistry	Regular	81
Sensofar Optical Profilometer	Metrology	Regular	97
Silanization Oven	Soft Lithography	Regular	76
Sputter B104 Left	Physical Vapor Deposition	Regular	32
Sputter B104 Right	Physical Vapor Deposition	Regular	33
Suss Resist Coater	Lithography	Regular	64
Suss Resist Developer	Lithography	Regular	65
SussMA6	Lithography	Regular	17
SussMA8	Lithography	Regular	18
Thermal Thin-Al Evaporator	Physical Vapor Deposition	Regular	99
Vac Oven 1	Lithography	Regular	22
Vac Oven 2	Lithography	Regular	23
Vac Oven 3	Lithography	Regular	24
Veeco AFM	Imaging and Analysis	Regular	12
Wafer Bonder	Specialty Tools	Regular	35
Wafer Cleaner	Specialty Tools	Regular	87
Wyatt DLS	Metrology	Regular	56
XRD	Metrology	Regular	49
XeF2 Silicon Etcher	Dry Etch	Regular	6
ZEISS FESEM	Imaging and Analysis	Regular	10

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