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Upcoming reservations
PECVD
Starting on Friday, March 27th, 2026 @ 12:15 PM
Ending on Friday, March 27th, 2026 @ 12:30 PM
Starting on Friday, March 27th, 2026 @ 12:15 PM
Ending on Friday, March 27th, 2026 @ 12:30 PM
PECVD
Starting on Friday, March 27th, 2026 @ 12:30 PM
Ending on Friday, March 27th, 2026 @ 12:45 PM
Starting on Friday, March 27th, 2026 @ 12:30 PM
Ending on Friday, March 27th, 2026 @ 12:45 PM
B101 Hot Phos Bench
Starting on Saturday, March 28th, 2026 @ 11:45 AM
Ending on Saturday, March 28th, 2026 @ 12:30 PM
Starting on Saturday, March 28th, 2026 @ 11:45 AM
Ending on Saturday, March 28th, 2026 @ 12:30 PM
Alerts & outages
Cleanroom closed this weekend
The cleanroom will be closed this weekend for maintenance
The cleanroom will be closed this weekend for maintenance
Current Facility use
20
You have unvalidated charges in my usage
You are using the 4Wave Cluster Sputter for the project named Project 2 since Thursday, March 26th, 2026 @ 5:01 PM.
You are using the 790 RIE Middle for the project named Cleanroom Eng since Monday, March 23rd, 2026 @ 2:33 PM.
You are using the Dektak XT 2 for the project named Cleanroom Eng since Monday, March 23rd, 2026 @ 12:38 AM.
You are using the CMP for the project named Project 3 since Thursday, February 12th, 2026 @ 1:30 AM.
You are using the Oxford III-V Etcher for the project named Project 2 since Tuesday, January 6th, 2026 @ 5:08 AM.
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