Change history: PECVD: PECVD Config
| Date/time | User | Action |
|---|---|---|
| Tuesday, December 19th, 2023 @ 11:02 AM | captain (Captain Nemo (captain)) | Added. Added configuration precursor slot “Position #0 Precursor”. Added configuration precursor slot “Position #1 Precursor”. Added configuration precursor slot “Position #2 Precursor”. |
| Tuesday, December 19th, 2023 @ 11:06 AM | captain (Captain Nemo (captain)) | Changed Available settings. |
| Tuesday, December 19th, 2023 @ 2:27 PM | captain (Captain Nemo (captain)) | No fields changed. |
| Friday, January 5th, 2024 @ 5:47 PM | captain (Captain Nemo (captain)) | Changed Schedule for configuration precursor slot “Position #1 Precursor”. |
| Monday, February 5th, 2024 @ 10:20 PM | captain (Captain Nemo (captain)) | Changed Schedule, Permanent setting and Permanent position for configuration precursor slot “Position #0 Precursor”. |
| Tuesday, February 6th, 2024 @ 10:06 AM | captain (Captain Nemo (captain)) | Added configuration precursor slot “Position #3 Precursor”. |
6 entries