| Critical Point Dryer 2 | Specialty Tools | | | Regular | | | | | 37 |
| Critical Point Dryer 1 | Specialty Tools | | | Regular | | | | | 36 |
| Wafer Bonder | Specialty Tools | | | Regular | | | | | 35 |
| Parylene Deposition | Physical Vapor Deposition | | | Regular | | | | | 34 |
| Sputter B104 Right | Physical Vapor Deposition | | | Regular | | | | | 33 |
| Sputter B104 Left | Physical Vapor Deposition | | | Regular | | | | | 32 |
| Dektak XT 1 | Metrology | | | Regular | | | | | 31 |
| Ellipsometer | Metrology | | | Regular | | | | | 30 |
| Goniometer | Metrology | | | Regular | | | | | 29 |
| Film Stress | Metrology | | | Regular | | | | | 28 |
| Gold Wire Bonder | Packaging | | | Regular | | | | | 27 |
| Nano-imprinter | Lithography | | | Regular | | | | | 26 |
| Laser Mask Writer | Lithography | | | Regular | | | | | 25 |
| Vac Oven 3 | Lithography | | | Regular | | | | | 24 |
| Vac Oven 2 | Lithography | | | Regular | | | | | 23 |
| Vac Oven 1 | Lithography | | | Regular | | | | | 22 |
| Hotplate 2 | Lithography | | | Regular | | | | | 21 |
| Hotplate 1 | Lithography | | | Regular | | | | | 20 |
| HMDS Prime | Lithography | | | Regular | | | | | 19 |
| SussMA8 | Lithography | | | Regular | | | | | 18 |
| SussMA6 | Lithography | | | Regular | | | | | 17 |
| ASML Stepper | Lithography | | | Regular | | | | | 16 |
| JEOL E-beam | Lithography | | | Regular | | | | | 15 |
| FEI FIB 2 | Focused Ion Beams | | | Regular | | | | | 14 |
| FEI FIB 1 | Focused Ion Beams | | | Regular | | | | | 13 |
| Veeco AFM | Imaging and Analysis | | | Regular | | | | | 12 |
| TITAN TEM | Imaging and Analysis | | | Regular | | | | | 11 |
| ZEISS FESEM | Imaging and Analysis | | | Regular | | | | | 10 |
| Unaxis ICP Etcher | Dry Etch | | | Regular | | | | | 9 |
| Ion Mill | Dry Etch | | | Regular | | | | | 8 |
| Microwave Asher | Dry Etch | | | Regular | | | | | 7 |
| XeF2 Silicon Etcher | Dry Etch | | | Regular | | | | | 6 |
| Unaxis Deep Si Etcher | Dry Etch | | | Regular | | | | | 5 |
| Atomic Layer Deposition | Chemical Vapor Deposition | | | Regular | | | | | 4 |
| Dicing saw | Packaging | | | Regular | | | | | 3 |
| PECVD | Chemical Vapor Deposition | | | Regular | | | | | 2 |
| Sinter | Gen Furnaces | | | Regular | | | | | 1 |