| Critical Point Dryer 2 | Specialty Tools |  |  | Regular |  |  |  |  | 37 |
| Critical Point Dryer 1 | Specialty Tools |  |  | Regular |  |  |  |  | 36 |
| Wafer Bonder | Specialty Tools |  |  | Regular |  |  |  |  | 35 |
| Parylene Deposition | Physical Vapor Deposition |  |  | Regular |  |  |  |  | 34 |
| Sputter B104 Right | Physical Vapor Deposition |  |  | Regular |  |  |  |  | 33 |
| Sputter B104 Left | Physical Vapor Deposition |  |  | Regular |  |  |  |  | 32 |
| Dektak XT 1 | Metrology |  |  | Regular |  |  |  |  | 31 |
| Ellipsometer | Metrology |  |  | Regular |  |  |  |  | 30 |
| Goniometer | Metrology |  |  | Regular |  |  |  |  | 29 |
| Film Stress | Metrology |  |  | Regular |  |  |  |  | 28 |
| Gold Wire Bonder | Packaging |  |  | Regular |  |  |  |  | 27 |
| Nano-imprinter | Lithography |  |  | Regular |  |  |  |  | 26 |
| Laser Mask Writer | Lithography |  |  | Regular |  |  |  |  | 25 |
| Vac Oven 3 | Lithography |  |  | Regular |  |  |  |  | 24 |
| Vac Oven 2 | Lithography |  |  | Regular |  |  |  |  | 23 |
| Vac Oven 1 | Lithography |  |  | Regular |  |  |  |  | 22 |
| Hotplate 2 | Lithography |  |  | Regular |  |  |  |  | 21 |
| Hotplate 1 | Lithography |  |  | Regular |  |  |  |  | 20 |
| HMDS Prime | Lithography |  |  | Regular |  |  |  |  | 19 |
| SussMA8 | Lithography |  |  | Regular |  |  |  |  | 18 |
| SussMA6 | Lithography |  |  | Regular |  |  |  |  | 17 |
| ASML Stepper | Lithography |  |  | Regular |  |  |  |  | 16 |
| JEOL E-beam | Lithography |  |  | Regular |  |  |  |  | 15 |
| FEI FIB 2 | Focused Ion Beams |  |  | Regular |  |  |  |  | 14 |
| FEI FIB 1 | Focused Ion Beams |  |  | Regular |  |  |  |  | 13 |
| Veeco AFM | Imaging and Analysis |  |  | Regular |  |  |  |  | 12 |
| TITAN TEM | Imaging and Analysis |  |  | Regular |  |  |  |  | 11 |
| ZEISS FESEM | Imaging and Analysis |  |  | Regular |  |  |  |  | 10 |
| Unaxis ICP Etcher | Dry Etch |  |  | Regular |  |  |  |  | 9 |
| Ion Mill | Dry Etch |  |  | Regular |  |  |  |  | 8 |
| Microwave Asher | Dry Etch |  |  | Regular |  |  |  |  | 7 |
| XeF2 Silicon Etcher | Dry Etch |  |  | Regular |  |  |  |  | 6 |
| Unaxis Deep Si Etcher | Dry Etch |  |  | Regular |  |  |  |  | 5 |
| Atomic Layer Deposition | Chemical Vapor Deposition |  |  | Regular |  |  |  |  | 4 |
| Dicing saw | Packaging |  |  | Regular |  |  |  |  | 3 |
| PECVD | Chemical Vapor Deposition |  |  | Regular |  |  |  |  | 2 |
| Sinter | Gen Furnaces |  |  | Regular |  |  |  |  | 1 |