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7 Name	1 category	4 operation mode	ID
Asylum AFM	Imaging and Analysis	Regular	50
Bruker AFM	Imaging and Analysis	Regular	53
Gemini 500 FESEM	Imaging and Analysis	Regular	137
Glow Discharge	Imaging and Analysis	Regular	98
Leica EM GP	Imaging and Analysis	Regular	69
NanoMill	Imaging and Analysis	Regular	57
TITAN TEM	Imaging and Analysis	Regular	11
Veeco AFM	Imaging and Analysis	Regular	12
ZEISS FESEM	Imaging and Analysis	Regular	10
Sinter	Gen Furnaces	Regular	1
AnnealSys RTA	Furnaces	Regular	78
B102 Furnace RCA Clean	Furnaces	Regular	114
LHL Tube 1 Oxide	Furnaces	Regular	94
LHL Tube 2 Anneal	Furnaces	Regular	95
LHL Tube 3 Nitride	Furnaces	Regular	96
LHL Tube 4 LTO	Furnaces	Regular	100
RHL Tube 1 Oxide	Furnaces	Regular	90
RHL Tube 2 Anneal	Furnaces	Regular	91
RHL Tube 3 Nitride	Furnaces	Regular	92
RHL Tube 4 Poly	Furnaces	Regular	93
FEI FIB 1	Focused Ion Beams	Regular	13
FEI FIB 2	Focused Ion Beams	Regular	14
790 RIE Middle	Dry Etch	Regular	129
790 RIE Nitride Left	Dry Etch	Regular	131
790 RIE Right	Dry Etch	Regular	130
Downstream Asher	Dry Etch	Regular	66
Ion Mill	Dry Etch	Regular	8
Microwave Asher	Dry Etch	Regular	7
Oxford III-V Etcher	Dry Etch	Regular	136
Oxford Metal Etcher	Dry Etch	Regular	134
Oxford Silicon Etcher	Dry Etch	Regular	135
SPTS Deep Si Etch	Dry Etch	Regular	58
Unaxis Deep Si Etcher	Dry Etch	Regular	5
Unaxis ICP Etcher	Dry Etch	Regular	9
XeF2 Silicon Etcher	Dry Etch	Regular	6
PECVD	Chemical Vapor Deposition	Regular	2
Atomic Layer Deposition	Chemical Vapor Deposition	Regular	4

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