NEMO-CE

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Action: 0 of 37 selected

6 Name	4 category	operation mode	ID
PDMS Spin Coater	Soft Lithography	Regular	70
Silanization Oven	Soft Lithography	Regular	76
Critical Point Dryer 1	Specialty Tools	Regular	36
Critical Point Dryer 2	Specialty Tools	Regular	37
Nano Enclosure	Specialty Tools	Regular	83
Wafer Bonder	Specialty Tools	Regular	35
Wafer Cleaner	Specialty Tools	Regular	87
A106 Base Hood	Wet Chemistry	Regular	118
B101 Acid Hood	Wet Chemistry	Regular	126
B101 Hot Phos Bench	Wet Chemistry	Regular	40
B101 KOH Bench	Wet Chemistry	Regular	41
B101 RCA Bench	Wet Chemistry	Regular	39
B101 Solvent Hood	Wet Chemistry	Regular	42
B101 Spin Rinse Dryer	Wet Chemistry	Regular	54
B102 Solvent Hood	Wet Chemistry	Regular	127
B102 Spin Rinse Dryer	Wet Chemistry	Regular	48
B104 Solvent Hood	Wet Chemistry	Regular	128
Metal Liftoff	Wet Chemistry	Regular	46
SPTS HF Vapor Etcher	Wet Chemistry	Regular	55
SSEC Piranha 1	Wet Chemistry	Regular	79
SSEC RCA	Wet Chemistry	Regular	81
CMP	Specialty Tools	Regular	38
Dicing saw	Packaging	Regular	3
PECVD	Chemical Vapor Deposition	Regular	2
Downstream Asher	Dry Etch	Regular	66
Unaxis Deep Si Etcher	Dry Etch	Regular	5
Unaxis ICP Etcher	Dry Etch	Regular	9
FEI FIB 1	Focused Ion Beams	Regular	13
FEI FIB 2	Focused Ion Beams	Regular	14
LHL Tube 4 LTO	Furnaces	Regular	100
TITAN TEM	Imaging and Analysis	Regular	11
A103 Spinner Left	Lithography/Spin-Develop	Regular	107
Dynatex GSX Scribe and Break	Packaging	Regular	89
Flip Chip Bonder	Packaging	Regular	52
B102 Acid Hood	Wet Chemistry	Regular	43
SSEC Piranha 2	Wet Chemistry	Regular	80
Sinter	Gen Furnaces	Regular	1

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