NEMO-CE

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Action: 0 of 37 selected

Name	2 category	operation mode	4 ID
PDMS Puncher	Soft Lithography	Regular	74
Microfluidic Test Station	Soft Lithography	Regular	75
Silanization Oven	Soft Lithography	Regular	76
PDMS Curing Oven 2	Soft Lithography	Regular	77
Wafer Bonder	Specialty Tools	Regular	35
Critical Point Dryer 1	Specialty Tools	Regular	36
Critical Point Dryer 2	Specialty Tools	Regular	37
CMP	Specialty Tools	Regular	38
Nano Enclosure	Specialty Tools	Regular	83
Wafer Cleaner	Specialty Tools	Regular	87
B101 RCA Bench	Wet Chemistry	Regular	39
B101 Hot Phos Bench	Wet Chemistry	Regular	40
B101 KOH Bench	Wet Chemistry	Regular	41
B101 Solvent Hood	Wet Chemistry	Regular	42
Metal Liftoff	Wet Chemistry	Regular	46
B102 Spin Rinse Dryer	Wet Chemistry	Regular	48
B101 Spin Rinse Dryer	Wet Chemistry	Regular	54
SPTS HF Vapor Etcher	Wet Chemistry	Regular	55
SSEC Piranha 1	Wet Chemistry	Regular	79
SSEC RCA	Wet Chemistry	Regular	81
A106 Base Hood	Wet Chemistry	Regular	118
B101 Acid Hood	Wet Chemistry	Regular	126
B102 Solvent Hood	Wet Chemistry	Regular	127
B104 Solvent Hood	Wet Chemistry	Regular	128
Unaxis Deep Si Etcher	Dry Etch	Regular	5
Unaxis ICP Etcher	Dry Etch	Regular	9
Downstream Asher	Dry Etch	Regular	66
FEI FIB 1	Focused Ion Beams	Regular	13
FEI FIB 2	Focused Ion Beams	Regular	14
LHL Tube 4 LTO	Furnaces	Regular	100
Sinter	Gen Furnaces	Regular	1
TITAN TEM	Imaging and Analysis	Regular	11
A103 Spinner Left	Lithography/Spin-Develop	Regular	107
Flip Chip Bonder	Packaging	Regular	52
Dynatex GSX Scribe and Break	Packaging	Regular	89
B102 Acid Hood	Wet Chemistry	Regular	43
SSEC Piranha 2	Wet Chemistry	Regular	80

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