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Action: 0 of 37 selected

6 Name	category	operation mode	3 ID
B102 Furnace RCA Clean	Furnaces	Regular	114
Filmetrics F50-UV Mapping	Metrology	Regular	115
A105 Develop Hood	Lithography/Spin-Develop	Regular	116
A105 Solvent Hood	Lithography/Spin-Develop	Regular	117
A106 Base Hood	Wet Chemistry	Regular	118
A101 Leica MZ7	Optical Microscopes	Regular	119
A101 Busch & Lomb	Optical Microscopes	Regular	120
A102 Nikon MM-800	Optical Microscopes	Regular	121
A103 Nikon L200	Optical Microscopes	Regular	122
A105 Nikon L200	Optical Microscopes	Regular	123
B107 Nikon L200	Optical Microscopes	Regular	124
B107 Nikon SMZ1500	Optical Microscopes	Regular	125
B101 Acid Hood	Wet Chemistry	Regular	126
B102 Solvent Hood	Wet Chemistry	Regular	127
B104 Solvent Hood	Wet Chemistry	Regular	128
790 RIE Middle	Dry Etch	Regular	129
790 RIE Right	Dry Etch	Regular	130
790 RIE Nitride Left	Dry Etch	Regular	131
E-Beam and Thermal Evaporator	Physical Vapor Deposition	Regular	132
E-Beam Evaporator	Physical Vapor Deposition	Regular	133
Oxford Metal Etcher	Dry Etch	Regular	134
Oxford Silicon Etcher	Dry Etch	Regular	135
Oxford III-V Etcher	Dry Etch	Regular	136
Gemini 500 FESEM	Imaging and Analysis	Regular	137
Sinter	Gen Furnaces	Regular	1
Unaxis Deep Si Etcher	Dry Etch	Regular	5
Unaxis ICP Etcher	Dry Etch	Regular	9
TITAN TEM	Imaging and Analysis	Regular	11
FEI FIB 1	Focused Ion Beams	Regular	13
FEI FIB 2	Focused Ion Beams	Regular	14
B102 Acid Hood	Wet Chemistry	Regular	43
Flip Chip Bonder	Packaging	Regular	52
Downstream Asher	Dry Etch	Regular	66
SSEC Piranha 2	Wet Chemistry	Regular	80
Dynatex GSX Scribe and Break	Packaging	Regular	89
LHL Tube 4 LTO	Furnaces	Regular	100
A103 Spinner Left	Lithography/Spin-Develop	Regular	107

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