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Action: 0 of 37 selected

5 Name	3 category	operation mode	ID
PDMS Curing Oven 2	Soft Lithography	Regular	77
PDMS Curing Oven 1	Soft Lithography	Regular	73
Microfluidic Test Station	Soft Lithography	Regular	75
Wafer Cleaner	Specialty Tools	Regular	87
Wafer Bonder	Specialty Tools	Regular	35
Nano Enclosure	Specialty Tools	Regular	83
Critical Point Dryer 2	Specialty Tools	Regular	37
Critical Point Dryer 1	Specialty Tools	Regular	36
SSEC RCA	Wet Chemistry	Regular	81
SSEC Piranha 1	Wet Chemistry	Regular	79
SPTS HF Vapor Etcher	Wet Chemistry	Regular	55
Metal Liftoff	Wet Chemistry	Regular	46
B104 Solvent Hood	Wet Chemistry	Regular	128
B102 Spin Rinse Dryer	Wet Chemistry	Regular	48
B102 Solvent Hood	Wet Chemistry	Regular	127
B101 Spin Rinse Dryer	Wet Chemistry	Regular	54
B101 Solvent Hood	Wet Chemistry	Regular	42
B101 RCA Bench	Wet Chemistry	Regular	39
B101 KOH Bench	Wet Chemistry	Regular	41
B101 Hot Phos Bench	Wet Chemistry	Regular	40
B101 Acid Hood	Wet Chemistry	Regular	126
A106 Base Hood	Wet Chemistry	Regular	118
CMP	Specialty Tools	Regular	38
Dicing saw	Packaging	Regular	3
Unaxis ICP Etcher	Dry Etch	Regular	9
Unaxis Deep Si Etcher	Dry Etch	Regular	5
Downstream Asher	Dry Etch	Regular	66
FEI FIB 2	Focused Ion Beams	Regular	14
FEI FIB 1	Focused Ion Beams	Regular	13
LHL Tube 4 LTO	Furnaces	Regular	100
Sinter	Gen Furnaces	Regular	1
TITAN TEM	Imaging and Analysis	Regular	11
A103 Spinner Left	Lithography/Spin-Develop	Regular	107
Flip Chip Bonder	Packaging	Regular	52
Dynatex GSX Scribe and Break	Packaging	Regular	89
SSEC Piranha 2	Wet Chemistry	Regular	80
B102 Acid Hood	Wet Chemistry	Regular	43

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