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Action: 0 of 37 selected

6 Name	4 category	operation mode	ID
Gemini 500 FESEM	Imaging and Analysis	Regular	137
Bruker AFM	Imaging and Analysis	Regular	53
Asylum AFM	Imaging and Analysis	Regular	50
RHL Tube 4 Poly	Furnaces	Regular	93
RHL Tube 3 Nitride	Furnaces	Regular	92
RHL Tube 2 Anneal	Furnaces	Regular	91
RHL Tube 1 Oxide	Furnaces	Regular	90
LHL Tube 3 Nitride	Furnaces	Regular	96
LHL Tube 2 Anneal	Furnaces	Regular	95
LHL Tube 1 Oxide	Furnaces	Regular	94
B102 Furnace RCA Clean	Furnaces	Regular	114
AnnealSys RTA	Furnaces	Regular	78
XeF2 Silicon Etcher	Dry Etch	Regular	6
SPTS Deep Si Etch	Dry Etch	Regular	58
Oxford Silicon Etcher	Dry Etch	Regular	135
Oxford Metal Etcher	Dry Etch	Regular	134
Oxford III-V Etcher	Dry Etch	Regular	136
Microwave Asher	Dry Etch	Regular	7
Ion Mill	Dry Etch	Regular	8
790 RIE Nitride Left	Dry Etch	Regular	131
790 RIE Middle	Dry Etch	Regular	129
Atomic Layer Deposition	Chemical Vapor Deposition	Regular	4
SSEC Piranha 2	Wet Chemistry	Regular	80
B102 Acid Hood	Wet Chemistry	Regular	43
Flip Chip Bonder	Packaging	Regular	52
Dynatex GSX Scribe and Break	Packaging	Regular	89
A103 Spinner Left	Lithography/Spin-Develop	Regular	107
TITAN TEM	Imaging and Analysis	Regular	11
LHL Tube 4 LTO	Furnaces	Regular	100
FEI FIB 2	Focused Ion Beams	Regular	14
FEI FIB 1	Focused Ion Beams	Regular	13
Unaxis ICP Etcher	Dry Etch	Regular	9
Unaxis Deep Si Etcher	Dry Etch	Regular	5
Downstream Asher	Dry Etch	Regular	66
CMP	Specialty Tools	Regular	38
790 RIE Right	Dry Etch	Regular	130
4Wave Cluster Sputter	Physical Vapor Deposition	Regular	63

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