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Action: 0 of 37 selected

4 Name	category	operation mode	ID
RHL Tube 4 Poly	Furnaces	Regular	93
SPTS Deep Si Etch	Dry Etch	Regular	58
SPTS HF Vapor Etcher	Wet Chemistry	Regular	55
SSEC Piranha 1	Wet Chemistry	Regular	79
SSEC RCA	Wet Chemistry	Regular	81
Sensofar Optical Profilometer	Metrology	Regular	97
Silanization Oven	Soft Lithography	Regular	76
Sputter B104 Left	Physical Vapor Deposition	Regular	32
Sputter B104 Right	Physical Vapor Deposition	Regular	33
Suss Resist Coater	Lithography	Regular	64
Suss Resist Developer	Lithography	Regular	65
SussMA6	Lithography	Regular	17
SussMA8	Lithography	Regular	18
Thermal Thin-Al Evaporator	Physical Vapor Deposition	Regular	99
Vac Oven 1	Lithography	Regular	22
Vac Oven 2	Lithography	Regular	23
Vac Oven 3	Lithography	Regular	24
Veeco AFM	Imaging and Analysis	Regular	12
Wafer Bonder	Specialty Tools	Regular	35
Wafer Cleaner	Specialty Tools	Regular	87
Wyatt DLS	Metrology	Regular	56
XRD	Metrology	Regular	49
XeF2 Silicon Etcher	Dry Etch	Regular	6
ZEISS FESEM	Imaging and Analysis	Regular	10
A103 Spinner Left	Lithography/Spin-Develop	Regular	107
B102 Acid Hood	Wet Chemistry	Regular	43
Downstream Asher	Dry Etch	Regular	66
Dynatex GSX Scribe and Break	Packaging	Regular	89
FEI FIB 1	Focused Ion Beams	Regular	13
FEI FIB 2	Focused Ion Beams	Regular	14
Flip Chip Bonder	Packaging	Regular	52
LHL Tube 4 LTO	Furnaces	Regular	100
SSEC Piranha 2	Wet Chemistry	Regular	80
TITAN TEM	Imaging and Analysis	Regular	11
Unaxis Deep Si Etcher	Dry Etch	Regular	5
Unaxis ICP Etcher	Dry Etch	Regular	9
4Wave Cluster Sputter	Physical Vapor Deposition	Regular	63

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