| Filmetrics F50-UV Mapping | Metrology |  |  | Regular |  |  |  |  | 115 |
| A105 Develop Hood | Lithography/Spin-Develop |  |  | Regular |  |  |  |  | 116 |
| A105 Solvent Hood | Lithography/Spin-Develop |  |  | Regular |  |  |  |  | 117 |
| A106 Base Hood | Wet Chemistry |  |  | Regular |  |  |  |  | 118 |
| A101 Leica MZ7 | Optical Microscopes |  |  | Regular |  |  |  |  | 119 |
| A101 Busch & Lomb | Optical Microscopes |  |  | Regular |  |  |  |  | 120 |
| A102 Nikon MM-800 | Optical Microscopes |  |  | Regular |  |  |  |  | 121 |
| A103 Nikon L200 | Optical Microscopes |  |  | Regular |  |  |  |  | 122 |
| A105 Nikon L200 | Optical Microscopes |  |  | Regular |  |  |  |  | 123 |
| B107 Nikon L200 | Optical Microscopes |  |  | Regular |  |  |  |  | 124 |
| B107 Nikon SMZ1500 | Optical Microscopes |  |  | Regular |  |  |  |  | 125 |
| B101 Acid Hood | Wet Chemistry |  |  | Regular |  |  |  |  | 126 |
| B102 Solvent Hood | Wet Chemistry |  |  | Regular |  |  |  |  | 127 |
| B104 Solvent Hood | Wet Chemistry |  |  | Regular |  |  |  |  | 128 |
| 790 RIE Middle | Dry Etch |  |  | Regular |  |  |  |  | 129 |
| 790 RIE Nitride Left | Dry Etch |  |  | Regular |  |  |  |  | 131 |
| E-Beam and Thermal Evaporator | Physical Vapor Deposition |  |  | Regular |  |  |  |  | 132 |
| E-Beam Evaporator | Physical Vapor Deposition |  |  | Regular |  |  |  |  | 133 |
| Oxford Metal Etcher | Dry Etch |  |  | Regular |  |  |  |  | 134 |
| Oxford Silicon Etcher | Dry Etch |  |  | Regular |  |  |  |  | 135 |
| Oxford III-V Etcher | Dry Etch |  |  | Regular |  |  |  |  | 136 |
| Gemini 500 FESEM | Imaging and Analysis |  |  | Regular |  |  |  |  | 137 |
| Unaxis Deep Si Etcher | Dry Etch |  |  | Regular |  |  |  |  | 5 |
| Unaxis ICP Etcher | Dry Etch |  |  | Regular |  |  |  |  | 9 |
| TITAN TEM | Imaging and Analysis |  |  | Regular |  |  |  |  | 11 |
| FEI FIB 1 | Focused Ion Beams |  |  | Regular |  |  |  |  | 13 |
| FEI FIB 2 | Focused Ion Beams |  |  | Regular |  |  |  |  | 14 |
| B102 Acid Hood | Wet Chemistry |  |  | Regular |  |  |  |  | 43 |
| Flip Chip Bonder | Packaging |  |  | Regular |  |  |  |  | 52 |
| Downstream Asher | Dry Etch |  |  | Regular |  |  |  |  | 66 |
| SSEC Piranha 2 | Wet Chemistry |  |  | Regular |  |  |  |  | 80 |
| Dynatex GSX Scribe and Break | Packaging |  |  | Regular |  |  |  |  | 89 |
| LHL Tube 4 LTO | Furnaces |  |  | Regular |  |  |  |  | 100 |
| A103 Spinner Left | Lithography/Spin-Develop |  |  | Regular |  |  |  |  | 107 |
| CMP | Specialty Tools |  |  | Regular |  |  |  |  | 38 |
| 790 RIE Right | Dry Etch |  |  | Regular |  |  |  |  | 130 |
| 4Wave Cluster Sputter | Physical Vapor Deposition |  |  | Regular |  |  |  |  | 63 |