| 5 | Nanofabrication Facility | Industry | > 20000 -> 10 % > 40000 -> 20 % > 60000 -> 30 % > 90000 -> 35 % | Every year |
| 2 | Imaging Facility | Industry | > 20000 -> 10 % > 40000 -> 20 % > 60000 -> 30 % > 90000 -> 35 % | Every year |
| 5 | Nanofabrication Facility | Industry | > 20000 -> 10 % > 40000 -> 20 % > 60000 -> 30 % > 90000 -> 35 % | Every year |
| 2 | Imaging Facility | Industry | > 20000 -> 10 % > 40000 -> 20 % > 60000 -> 30 % > 90000 -> 35 % | Every year |
| 5 | Nanofabrication Facility | Industry | > 20000 -> 10 % > 40000 -> 20 % > 60000 -> 30 % > 90000 -> 35 % | Every year |
| 2 | Imaging Facility | Industry | > 20000 -> 10 % > 40000 -> 20 % > 60000 -> 30 % > 90000 -> 35 % | Every year |
| 5 | Nanofabrication Facility | Industry | > 20000 -> 10 % > 40000 -> 20 % > 60000 -> 30 % > 90000 -> 35 % | Every year |
| 2 | Imaging Facility | Industry | > 20000 -> 10 % > 40000 -> 20 % > 60000 -> 30 % > 90000 -> 35 % | Every year |