| Urgency | Severity | Tool | Tool category | Problem category | Last updated | Created | Description |
|---|---|---|---|---|---|---|---|
| High | Sinter | Gen Furnaces | 7 years, 9 months ago by Captain | 7 years, 9 months ago | Tool is offline for maintenance | ||
| High | PECVD | Chemical Vapor Deposition | 2 years, 1 month ago by Pierre | 2 years, 1 month ago | Electrode temperature did not increase in the beginning of the 180 C cleaning recipe. Aborted job. | ||
| High | Oxford Metal Etcher | Dry Etch | 1 month, 3 weeks ago | test | |||
| Normal | Dicing saw | Packaging | 7 years, 9 months ago | Blade needs to be changed | |||
| Normal | 4Wave Cluster Sputter | Physical Vapor Deposition | User error | 2 months, 2 weeks ago | asdasdad |
| Urgency | Severity | Tool | Category | Created | Resolved | Description |
|---|