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Maintenance

Urgency Severity Tool Tool category Problem category Last updated Created Description
Normal 3D Optical Profiler Nanofabrication Facility 2 weeks, 6 days ago This is broken
Normal FEI Helios Imaging Facility 2 weeks, 6 days ago There is a problem with this tool
Urgency Severity Tool Category Created Resolved Description
Normal PECVD Thursday, September 12th, 2024 @ 10:42 AM Friday, November 1st, 2024 @ 4:27 PM There is a pb
Normal PECVD Saturday, May 13th, 2023 @ 8:53 AM Wednesday, July 10th, 2024 @ 8:11 AM test