| Urgency | Severity | Tool | Tool category | Problem category | Last updated | Created | Description |
|---|---|---|---|---|---|---|---|
| Normal | 3D Optical Profiler | Nanofabrication Facility | 3 weeks, 2 days ago | This is broken | |||
| Normal | FEI Helios | Imaging Facility | 3 weeks, 2 days ago | There is a problem with this tool |
| Urgency | Severity | Tool | Category | Created | Resolved | Description |
|---|---|---|---|---|---|---|
| Normal | PECVD | Thursday, September 12th, 2024 @ 10:42 AM | Friday, November 1st, 2024 @ 4:27 PM | There is a pb | ||
| Normal | PECVD | Saturday, May 13th, 2023 @ 8:53 AM | Wednesday, July 10th, 2024 @ 8:11 AM | test |