|
Urgency
|
Severity
|
Tool
|
Tool category
|
Problem category
|
Last updated
|
Created
|
Description |
| High |
|
Sinter |
Gen Furnaces |
|
7 years, 7 months ago by Captain
|
7 years, 7 months ago |
Tool is offline for maintenance |
| High |
|
PECVD |
Chemical Vapor Deposition |
|
2 years ago by Pierre
|
1 year, 11 months ago |
Electrode temperature did not increase in the beginning of the 180 C cleaning recipe. Aborted job. |
| High |
|
Oxford Metal Etcher |
Dry Etch |
|
|
1 week, 4 days ago |
test |
| Normal |
|
Dicing saw |
Packaging |
|
|
7 years, 7 months ago |
Blade needs to be changed |
| Normal |
|
4Wave Cluster Sputter |
Physical Vapor Deposition |
User error |
|
4 weeks, 1 day ago |
asdasdad |