| Urgency |
Severity |
Tool |
Category |
Created |
Resolved |
Description |
| Normal |
|
CL ICP Etcher |
|
Sunday, September 14th, 2025 @ 9:46 PM |
Friday, November 21st, 2025 @ 12:28 PM |
Chiller upgrade in progress |
| Normal |
|
3D Optical Profiler |
|
Tuesday, August 19th, 2025 @ 2:20 PM |
Friday, November 21st, 2025 @ 12:27 PM |
This is broken |
| High |
|
FEI Helios |
|
Monday, November 17th, 2025 @ 12:28 PM |
Monday, November 17th, 2025 @ 12:30 PM |
Scheduled maintenance |
| Low |
|
FEI Helios |
|
Tuesday, August 19th, 2025 @ 2:20 PM |
Monday, November 17th, 2025 @ 12:30 PM |
There is a problem with this tool |
| Normal |
|
PECVD |
|
Thursday, September 12th, 2024 @ 10:42 AM |
Friday, November 1st, 2024 @ 4:27 PM |
There is a pb |
| Normal |
|
PECVD |
|
Saturday, May 13th, 2023 @ 8:53 AM |
Wednesday, July 10th, 2024 @ 8:11 AM |
test |