PECVD rate

The rates for tool usage & training, area access and staff charges are to be expressed per hour.

Tool usage (Academia)
Effective date	Amount	Minimum charge	Service fee	Flat	Daily rate
	50.00		30.00
					Daily rate

Tool individual training (Academia)
Effective date	Amount	Minimum charge	Service fee	Flat	Daily rate


Tool group training (Academia)
Effective date	Amount	Minimum charge	Service fee	Flat	Daily rate

Tool usage (Industry)
Effective date	Amount	Minimum charge	Service fee	Flat	Daily rate
					Daily rate

Tool individual training (Industry)
Effective date	Amount	Minimum charge	Service fee	Flat	Daily rate


Tool group training (Industry)
Effective date	Amount	Minimum charge	Service fee	Flat	Daily rate

Tool usage (Internal)
Effective date	Amount	Minimum charge	Service fee	Flat	Daily rate
					Daily rate

Tool individual training (Internal)
Effective date	Amount	Minimum charge	Service fee	Flat	Daily rate


Tool group training (Internal)
Effective date	Amount	Minimum charge	Service fee	Flat	Daily rate