Atomic Layer Deposition rate
The rates for tool usage & training, area access and staff charges are to be expressed per hour.
Tool usage (Academia) |
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| Effective date | Amount | Minimum charge | Service fee | Flat | Daily rate | |
| 120.00 | ||||||
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Tool individual training (Academia) |
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| Effective date | Amount | Minimum charge | Service fee | Flat | Daily rate | |
| 120.00 | ||||||
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Tool group training (Academia) |
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| Effective date | Amount | Minimum charge | Service fee | Flat | Daily rate | |
| 60.00 | ||||||
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Tool usage (Industry) |
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| Effective date | Amount | Minimum charge | Service fee | Flat | Daily rate | |
| 240.00 | ||||||
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Tool individual training (Industry) |
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| Effective date | Amount | Minimum charge | Service fee | Flat | Daily rate | |
| 240.00 | ||||||
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Tool group training (Industry) |
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| Effective date | Amount | Minimum charge | Service fee | Flat | Daily rate | |
| 120.00 | ||||||
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Tool usage (Internal) |
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| Effective date | Amount | Minimum charge | Service fee | Flat | Daily rate | |
| 03/13/2026 | 60.00 | 30.00 | 15.00 | |||
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Tool individual training (Internal) |
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| Effective date | Amount | Minimum charge | Service fee | Flat | Daily rate | |
| 60.00 | ||||||
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Tool group training (Internal) |
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| Effective date | Amount | Minimum charge | Service fee | Flat | Daily rate | |
| 30.00 | ||||||
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