Rates
| Tool | Effective_date | Category | Rate | Flat Rate | Minimum Charge | Service fee | |
|---|---|---|---|---|---|---|---|
| Atomic Layer Deposition | 03/13/2026 | Internal | 60.00 | 30.00 | 15.00 | Edit | |
| PECVD | Academia | 50.00 | 30.00 | Edit |
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| Tool | Effective_date | Category | Rate | Flat Rate | Minimum Charge | Service fee | |
|---|---|---|---|---|---|---|---|
| Atomic Layer Deposition | 03/13/2026 | Internal | 60.00 | 30.00 | 15.00 | Edit | |
| PECVD | Academia | 50.00 | 30.00 | Edit |