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Tool Effective_date Type Category Rate Flat Rate Minimum Charge Service fee
3D Optical Profiler Tool usage I: Internal 60.00 Edit
3D Optical Profiler Tool individual training I: Internal 60.00 Edit
3D Optical Profiler Tool group training I: Internal 60.00 Edit
CL ICP Etcher Tool usage EA: External Academic 40.00 Edit
CL ICP Etcher Tool usage I: Internal 20.00 Edit
CL ICP Etcher Tool individual training EA: External Academic 40.00 Edit
CL ICP Etcher Tool individual training I: Internal 20.00 Edit
CL ICP Etcher Tool group training EA: External Academic 40.00 Edit
CL ICP Etcher Tool group training I: Internal 20.00 Edit
FEI Helios Tool usage I: Internal 20.00 Edit
FEI Helios Tool individual training I: Internal 20.00 Edit
FEI Helios Tool group training I: Internal 20.00 Edit
JEOL Thermofisher Tool usage I: Internal 50.00 Edit
JEOL Thermofisher Tool usage Industry 100.00 Edit
JEOL Thermofisher Tool individual training I: Internal 50.00 Edit
JEOL Thermofisher Tool individual training Industry 100.00 Edit
JEOL Thermofisher Tool group training I: Internal 25.00 Edit
JEOL Thermofisher Tool group training Industry 50.00 Edit
PECVD Tool usage I: Internal 100.00 Edit
PECVD Tool usage Industry 200.00 Edit
PECVD Tool individual training I: Internal 100.00 Edit
PECVD Tool individual training Industry 200.00 Edit
PECVD Tool group training I: Internal 50.00 Edit
PECVD Tool group training Industry 100.00 Edit
Sinter Tool usage I: Internal 60.00 Edit