Rates
| Tool | Effective_date | Type | Category | Rate | Flat Rate | Minimum Charge | Service fee | |
|---|---|---|---|---|---|---|---|---|
| Atomic Layer Deposition | Tool usage | Academia | 120.00 | Edit | ||||
| Atomic Layer Deposition | Tool usage | Industry | 240.00 | Edit | ||||
| Atomic Layer Deposition | 03/13/2026 | Tool usage | Internal | 60.00 | 30.00 | 15.00 | Edit | |
| Atomic Layer Deposition | Tool individual training | Academia | 120.00 | Edit | ||||
| Atomic Layer Deposition | Tool individual training | Industry | 240.00 | Edit | ||||
| Atomic Layer Deposition | Tool individual training | Internal | 60.00 | Edit | ||||
| Atomic Layer Deposition | Tool group training | Academia | 60.00 | Edit | ||||
| Atomic Layer Deposition | Tool group training | Industry | 120.00 | Edit | ||||
| Atomic Layer Deposition | Tool group training | Internal | 30.00 | Edit | ||||
| PECVD | Tool usage | Academia | 50.00 | 30.00 | Edit |
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