Facility )

This resource is available.

Tools that fully depend on Facility

• 3D Optical Profiler - in use by Captain Nemo (captain)
• FEI Helios
• JEOL Thermofisher
• PECVD
• Sinter
• Test

Tools that partially depend on Facility

• Copy of CL ICP Etcher

Areas that depend on Facility

• Cleanroom