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Action: 0 of 100 selected

1 Name	category	2 operation mode	7 ID
ZEISS FESEM	Imaging and Analysis	Regular	10
XeF2 Silicon Etcher	Dry Etch	Regular	6
XRD	Metrology	Regular	49
Wyatt DLS	Metrology	Regular	56
Wafer Cleaner	Specialty Tools	Regular	87
Wafer Bonder	Specialty Tools	Regular	35
Veeco AFM	Imaging and Analysis	Regular	12
Vac Oven 3	Lithography	Regular	24
Vac Oven 2	Lithography	Regular	23
Vac Oven 1	Lithography	Regular	22
Unaxis ICP Etcher	Dry Etch	Regular	9
Unaxis Deep Si Etcher	Dry Etch	Regular	5
Thermal Thin-Al Evaporator	Physical Vapor Deposition	Regular	99
TITAN TEM	Imaging and Analysis	Regular	11
SussMA8	Lithography	Regular	18
SussMA6	Lithography	Regular	17
Suss Resist Developer	Lithography	Regular	65
Suss Resist Coater	Lithography	Regular	64
Sputter B104 Right	Physical Vapor Deposition	Regular	33
Sputter B104 Left	Physical Vapor Deposition	Regular	32
Sinter	Gen Furnaces	Regular	1
Silanization Oven	Soft Lithography	Regular	76
Sensofar Optical Profilometer	Metrology	Regular	97
SSEC RCA	Wet Chemistry	Regular	81
SSEC Piranha 2	Wet Chemistry	Regular	80
SSEC Piranha 1	Wet Chemistry	Regular	79
SPTS HF Vapor Etcher	Wet Chemistry	Regular	55
SPTS Deep Si Etch	Dry Etch	Regular	58
RHL Tube 4 Poly	Furnaces	Regular	93
RHL Tube 3 Nitride	Furnaces	Regular	92
RHL Tube 2 Anneal	Furnaces	Regular	91
RHL Tube 1 Oxide	Furnaces	Regular	90
Parylene Deposition	Physical Vapor Deposition	Regular	34
Parametric Test	Metrology	Regular	47
PECVD	Chemical Vapor Deposition	Regular	2
PDMS Spin Coater	Soft Lithography	Regular	70
PDMS Puncher	Soft Lithography	Regular	74
PDMS Plasma Bonder	Soft Lithography	Regular	72
PDMS Mixer	Soft Lithography	Regular	71
PDMS Curing Oven 2	Soft Lithography	Regular	77
PDMS Curing Oven 1	Soft Lithography	Regular	73
Oxford Silicon Etcher	Dry Etch	Regular	135
Oxford Metal Etcher	Dry Etch	Regular	134
Oxford III-V Etcher	Dry Etch	Regular	136
Nitrogen Oven	Lithography	Regular	86
NanoSpec	Metrology	Regular	61
NanoMill	Imaging and Analysis	Regular	57
Nano-imprinter	Lithography	Regular	26
Nano Enclosure	Specialty Tools	Regular	83
Microwave Asher	Dry Etch	Regular	7
Microfluidic Test Station	Soft Lithography	Regular	75
Metal Liftoff	Wet Chemistry	Regular	46
Mercury Probe	Metrology	Regular	88
MLA 150	Lithography	Regular	85
Leica EM GP	Imaging and Analysis	Regular	69
Laser Mask Writer	Lithography	Regular	25
LHL Tube 4 LTO	Furnaces	Regular	100
LHL Tube 3 Nitride	Furnaces	Regular	96
LHL Tube 2 Anneal	Furnaces	Regular	95
LHL Tube 1 Oxide	Furnaces	Regular	94
Jandel 4pt Probe	Metrology	Regular	62
JEOL E-beam Cleanroom	Lithography	Regular	59
JEOL E-beam	Lithography	Regular	15
Ion Mill	Dry Etch	Regular	8
Hotplate 2	Lithography	Regular	21
Hotplate 1	Lithography	Regular	20
Hall Effect Measurement	Metrology	Regular	82
HMDS Prime	Lithography	Regular	19
Goniometer	Metrology	Regular	29
Gold Wire Bonder	Packaging	Regular	27
Glow Discharge	Imaging and Analysis	Regular	98
Gemini 500 FESEM	Imaging and Analysis	Regular	137
Four Dimensions 4pt Probe	Metrology	Regular	67
Flip Chip Bonder	Packaging	Regular	52
Filmetrics F50-UV Mapping	Metrology	Regular	115
Filmetrics F40-UV	Metrology	Regular	60
Film Stress	Metrology	Regular	28
FEI FIB 2	Focused Ion Beams	Regular	14
FEI FIB 1	Focused Ion Beams	Regular	13
Ellipsometer	Metrology	Regular	30
E-Beam and Thermal Evaporator	Physical Vapor Deposition	Regular	132
E-Beam Evaporator	Physical Vapor Deposition	Regular	133
Dynatex GSX Scribe and Break	Packaging	Regular	89
Downstream Asher	Dry Etch	Regular	66
Dicing saw	Packaging	Regular	3
Dektak XT 2	Metrology	Regular	68
Dektak XT 1	Metrology	Regular	31
DUV Resist Stabilizer	Lithography	Regular	84
Critical Point Dryer 2	Specialty Tools	Regular	37
Critical Point Dryer 1	Specialty Tools	Regular	36
CMP	Specialty Tools	Regular	38
Bruker AFM	Imaging and Analysis	Regular	53
B107 Nikon SMZ1500	Optical Microscopes	Regular	125
B107 Nikon L200	Optical Microscopes	Regular	124
B104 Solvent Hood	Wet Chemistry	Regular	128
B102 Spin Rinse Dryer	Wet Chemistry	Regular	48
B102 Solvent Hood	Wet Chemistry	Regular	127
B102 Furnace RCA Clean	Furnaces	Regular	114
B102 Acid Hood	Wet Chemistry	Regular	43
B101 Spin Rinse Dryer	Wet Chemistry	Regular	54

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