NEMO-CE

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Action: 0 of 100 selected

7 Name	4 category	operation mode	ID
Unaxis ICP Etcher	Dry Etch	Regular	9
Unaxis Deep Si Etcher	Dry Etch	Regular	5
Downstream Asher	Dry Etch	Regular	66
FEI FIB 2	Focused Ion Beams	Regular	14
FEI FIB 1	Focused Ion Beams	Regular	13
LHL Tube 4 LTO	Furnaces	Regular	100
Sinter	Gen Furnaces	Regular	1
TITAN TEM	Imaging and Analysis	Regular	11
A103 Spinner Left	Lithography/Spin-Develop	Regular	107
Flip Chip Bonder	Packaging	Regular	52
Dynatex GSX Scribe and Break	Packaging	Regular	89
SSEC Piranha 2	Wet Chemistry	Regular	80
B102 Acid Hood	Wet Chemistry	Regular	43
PECVD	Chemical Vapor Deposition	Regular	2
Atomic Layer Deposition	Chemical Vapor Deposition	Regular	4
XeF2 Silicon Etcher	Dry Etch	Regular	6
SPTS Deep Si Etch	Dry Etch	Regular	58
Oxford Silicon Etcher	Dry Etch	Regular	135
Oxford Metal Etcher	Dry Etch	Regular	134
Oxford III-V Etcher	Dry Etch	Regular	136
Microwave Asher	Dry Etch	Regular	7
Ion Mill	Dry Etch	Regular	8
790 RIE Right	Dry Etch	Regular	130
790 RIE Nitride Left	Dry Etch	Regular	131
790 RIE Middle	Dry Etch	Regular	129
RHL Tube 4 Poly	Furnaces	Regular	93
RHL Tube 3 Nitride	Furnaces	Regular	92
RHL Tube 2 Anneal	Furnaces	Regular	91
RHL Tube 1 Oxide	Furnaces	Regular	90
LHL Tube 3 Nitride	Furnaces	Regular	96
LHL Tube 2 Anneal	Furnaces	Regular	95
LHL Tube 1 Oxide	Furnaces	Regular	94
B102 Furnace RCA Clean	Furnaces	Regular	114
AnnealSys RTA	Furnaces	Regular	78
ZEISS FESEM	Imaging and Analysis	Regular	10
Veeco AFM	Imaging and Analysis	Regular	12
NanoMill	Imaging and Analysis	Regular	57
Leica EM GP	Imaging and Analysis	Regular	69
Glow Discharge	Imaging and Analysis	Regular	98
Gemini 500 FESEM	Imaging and Analysis	Regular	137
Bruker AFM	Imaging and Analysis	Regular	53
Asylum AFM	Imaging and Analysis	Regular	50
Vac Oven 3	Lithography	Regular	24
Vac Oven 2	Lithography	Regular	23
Vac Oven 1	Lithography	Regular	22
Suss Resist Developer	Lithography	Regular	65
Suss Resist Coater	Lithography	Regular	64
SussMA8	Lithography	Regular	18
SussMA6	Lithography	Regular	17
Nitrogen Oven	Lithography	Regular	86
Nano-imprinter	Lithography	Regular	26
MLA 150	Lithography	Regular	85
Laser Mask Writer	Lithography	Regular	25
JEOL E-beam Cleanroom	Lithography	Regular	59
JEOL E-beam	Lithography	Regular	15
Hotplate 2	Lithography	Regular	21
Hotplate 1	Lithography	Regular	20
HMDS Prime	Lithography	Regular	19
DUV Resist Stabilizer	Lithography	Regular	84
ASML Stepper	Lithography	Regular	16
ASML Design Station	Lithography	Regular	45
A105 Solvent Hood	Lithography/Spin-Develop	Regular	117
A105 Develop Hood	Lithography/Spin-Develop	Regular	116
A104 EBL Spinner Right	Lithography/Spin-Develop	Regular	110
A104 EBL Spinner Left	Lithography/Spin-Develop	Regular	109
A104 EBL Spinner Hood	Lithography/Spin-Develop	Regular	111
A104 EBL Develop Hood Right	Lithography/Spin-Develop	Regular	113
A104 EBL Develop Hood Left	Lithography/Spin-Develop	Regular	112
A103 Spinner Right	Lithography/Spin-Develop	Regular	108
A103 Spinner Hood	Lithography/Spin-Develop	Regular	105
A103 Photomask Bench	Lithography/Spin-Develop	Regular	44
A103 Develop Hood	Lithography/Spin-Develop	Regular	106
A102 Spinner Right	Lithography/Spin-Develop	Regular	102
A102 Spinner Left	Lithography/Spin-Develop	Regular	101
A102 Spinner Hood	Lithography/Spin-Develop	Regular	103
A102 Develop Hood	Lithography/Spin-Develop	Regular	104
XRD	Metrology	Regular	49
Wyatt DLS	Metrology	Regular	56
Sensofar Optical Profilometer	Metrology	Regular	97
Parametric Test	Metrology	Regular	47
NanoSpec	Metrology	Regular	61
Mercury Probe	Metrology	Regular	88
Jandel 4pt Probe	Metrology	Regular	62
Hall Effect Measurement	Metrology	Regular	82
Goniometer	Metrology	Regular	29
Four Dimensions 4pt Probe	Metrology	Regular	67
Film Stress	Metrology	Regular	28
Filmetrics F50-UV Mapping	Metrology	Regular	115
Filmetrics F40-UV	Metrology	Regular	60
Ellipsometer	Metrology	Regular	30
Dektak XT 2	Metrology	Regular	68
Dektak XT 1	Metrology	Regular	31
B107 Nikon SMZ1500	Optical Microscopes	Regular	125
B107 Nikon L200	Optical Microscopes	Regular	124
A105 Nikon L200	Optical Microscopes	Regular	123
A103 Nikon L200	Optical Microscopes	Regular	122
A102 Nikon MM-800	Optical Microscopes	Regular	121
A101 Leica MZ7	Optical Microscopes	Regular	119
A101 Busch & Lomb	Optical Microscopes	Regular	120
Dicing saw	Packaging	Regular	3

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