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Unaxis Deep Si EtcherDry EtchTrueFalseRegularFalseFalse5
Unaxis ICP EtcherDry EtchTrueFalseRegularFalseFalse9
TITAN TEMImaging and AnalysisTrueFalseRegularFalseFalse11
FEI FIB 1Focused Ion BeamsTrueFalseRegularFalseFalse13
FEI FIB 2Focused Ion BeamsTrueFalseRegularFalseFalse14
B102 Acid HoodWet ChemistryTrueFalseRegularFalseFalse43
Flip Chip BonderPackagingTrueFalseRegularFalseFalse52
Downstream AsherDry EtchTrueFalseRegularFalseFalse66
SSEC Piranha 2Wet ChemistryTrueFalseRegularFalseFalse80
Dynatex GSX Scribe and BreakPackagingTrueFalseRegularFalseFalse89
LHL Tube 4 LTOFurnacesTrueFalseRegularFalseFalse100
A103 Spinner LeftLithography/Spin-DevelopTrueFalseRegularFalseFalse107
SinterGen FurnacesTrueFalseRegularTrueFalse1
CMPSpecialty ToolsTrueTrueRegularFalseTrue38
Dicing sawPackagingTrueTrueRegularTrueTrue3
Atomic Layer DepositionChemical Vapor DepositionTrueTrueRegularFalseFalse4
XeF2 Silicon EtcherDry EtchTrueTrueRegularFalseFalse6
Microwave AsherDry EtchTrueTrueRegularFalseFalse7
Ion MillDry EtchTrueTrueRegularFalseFalse8
ZEISS FESEMImaging and AnalysisTrueTrueRegularFalseFalse10
Veeco AFMImaging and AnalysisTrueTrueRegularFalseFalse12
JEOL E-beamLithographyTrueTrueRegularFalseFalse15
ASML StepperLithographyTrueTrueRegularFalseFalse16
SussMA6LithographyTrueTrueRegularFalseFalse17
SussMA8LithographyTrueTrueRegularFalseFalse18
HMDS PrimeLithographyTrueTrueRegularFalseFalse19
Hotplate 1LithographyTrueTrueRegularFalseFalse20
Hotplate 2LithographyTrueTrueRegularFalseFalse21
Vac Oven 1LithographyTrueTrueRegularFalseFalse22
Vac Oven 2LithographyTrueTrueRegularFalseFalse23
Vac Oven 3LithographyTrueTrueRegularFalseFalse24
Laser Mask WriterLithographyTrueTrueRegularFalseFalse25
Nano-imprinterLithographyTrueTrueRegularFalseFalse26
Gold Wire BonderPackagingTrueTrueRegularFalseFalse27
Film StressMetrologyTrueTrueRegularFalseFalse28
GoniometerMetrologyTrueTrueRegularFalseFalse29
EllipsometerMetrologyTrueTrueRegularFalseFalse30
Dektak XT 1MetrologyTrueTrueRegularFalseFalse31
Sputter B104 LeftPhysical Vapor DepositionTrueTrueRegularFalseFalse32
Sputter B104 RightPhysical Vapor DepositionTrueTrueRegularFalseFalse33
Parylene DepositionPhysical Vapor DepositionTrueTrueRegularFalseFalse34
Wafer BonderSpecialty ToolsTrueTrueRegularFalseFalse35
Critical Point Dryer 1Specialty ToolsTrueTrueRegularFalseFalse36
Critical Point Dryer 2Specialty ToolsTrueTrueRegularFalseFalse37
B101 RCA BenchWet ChemistryTrueTrueRegularFalseFalse39
B101 Hot Phos BenchWet ChemistryTrueTrueRegularFalseFalse40
B101 KOH BenchWet ChemistryTrueTrueRegularFalseFalse41
B101 Solvent HoodWet ChemistryTrueTrueRegularFalseFalse42
A103 Photomask BenchLithography/Spin-DevelopTrueTrueRegularFalseFalse44
ASML Design StationLithographyTrueTrueRegularFalseFalse45
Metal LiftoffWet ChemistryTrueTrueRegularFalseFalse46
Parametric TestMetrologyTrueTrueRegularFalseFalse47
B102 Spin Rinse DryerWet ChemistryTrueTrueRegularFalseFalse48
XRDMetrologyTrueTrueRegularFalseFalse49
Asylum AFMImaging and AnalysisTrueTrueRegularFalseFalse50
Aluminum Wire BonderPackagingTrueTrueRegularFalseFalse51
Bruker AFMImaging and AnalysisTrueTrueRegularFalseFalse53
B101 Spin Rinse DryerWet ChemistryTrueTrueRegularFalseFalse54
SPTS HF Vapor EtcherWet ChemistryTrueTrueRegularFalseFalse55
Wyatt DLSMetrologyTrueTrueRegularFalseFalse56
NanoMillImaging and AnalysisTrueTrueRegularFalseFalse57
SPTS Deep Si EtchDry EtchTrueTrueRegularFalseFalse58
JEOL E-beam CleanroomLithographyTrueTrueRegularFalseFalse59
Filmetrics F40-UVMetrologyTrueTrueRegularFalseFalse60
NanoSpecMetrologyTrueTrueRegularFalseFalse61
Jandel 4pt ProbeMetrologyTrueTrueRegularFalseFalse62
4Wave Cluster SputterPhysical Vapor DepositionTrueTrueRegularFalseFalse63
Suss Resist CoaterLithographyTrueTrueRegularFalseFalse64
Suss Resist DeveloperLithographyTrueTrueRegularFalseFalse65
Four Dimensions 4pt ProbeMetrologyTrueTrueRegularFalseFalse67
Dektak XT 2MetrologyTrueTrueRegularFalseFalse68
Leica EM GPImaging and AnalysisTrueTrueRegularFalseFalse69
PDMS Spin CoaterSoft LithographyTrueTrueRegularFalseFalse70
PDMS MixerSoft LithographyTrueTrueRegularFalseFalse71
PDMS Plasma BonderSoft LithographyTrueTrueRegularFalseFalse72
PDMS Curing Oven 1Soft LithographyTrueTrueRegularFalseFalse73
PDMS PuncherSoft LithographyTrueTrueRegularFalseFalse74
Microfluidic Test StationSoft LithographyTrueTrueRegularFalseFalse75
Silanization OvenSoft LithographyTrueTrueRegularFalseFalse76
PDMS Curing Oven 2Soft LithographyTrueTrueRegularFalseFalse77
AnnealSys RTAFurnacesTrueTrueRegularFalseFalse78
SSEC Piranha 1Wet ChemistryTrueTrueRegularFalseFalse79
SSEC RCAWet ChemistryTrueTrueRegularFalseFalse81
Hall Effect MeasurementMetrologyTrueTrueRegularFalseFalse82
Nano EnclosureSpecialty ToolsTrueTrueRegularFalseFalse83
DUV Resist StabilizerLithographyTrueTrueRegularFalseFalse84
MLA 150LithographyTrueTrueRegularFalseFalse85
Nitrogen OvenLithographyTrueTrueRegularFalseFalse86
Wafer CleanerSpecialty ToolsTrueTrueRegularFalseFalse87
Mercury ProbeMetrologyTrueTrueRegularFalseFalse88
RHL Tube 1 OxideFurnacesTrueTrueRegularFalseFalse90
RHL Tube 2 AnnealFurnacesTrueTrueRegularFalseFalse91
RHL Tube 3 NitrideFurnacesTrueTrueRegularFalseFalse92
RHL Tube 4 PolyFurnacesTrueTrueRegularFalseFalse93
LHL Tube 1 OxideFurnacesTrueTrueRegularFalseFalse94
LHL Tube 2 AnnealFurnacesTrueTrueRegularFalseFalse95
LHL Tube 3 NitrideFurnacesTrueTrueRegularFalseFalse96
Sensofar Optical ProfilometerMetrologyTrueTrueRegularFalseFalse97
Glow DischargeImaging and AnalysisTrueTrueRegularFalseFalse98
Thermal Thin-Al EvaporatorPhysical Vapor DepositionTrueTrueRegularFalseFalse99

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