| 4 | Nanofabrication Facility | Internal | > 500 -> 50 %
> 1250 -> 75 % | Every month |
|---|
| 3 | Imaging Facility | Internal | > 500 -> 50 %
> 1250 -> 75 % | Every month |
|---|
| 5 | Nanofabrication Facility | Industry | > 20000 -> 10 %
> 40000 -> 20 %
> 60000 -> 30 %
> 90000 -> 35 % | Every year |
|---|
| 2 | Imaging Facility | Industry | > 20000 -> 10 %
> 40000 -> 20 %
> 60000 -> 30 %
> 90000 -> 35 % | Every year |
|---|