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0 of 14 selected
Item
1
Type
3
Category
Effective date
2
Time
Amount
Flat
Daily
Minimum charge
Service fee
CleanroomArea usageInternal--50.00FalseFalse--
CleanroomArea usageIndustry--200.00FalseFalse--
CleanroomArea usageAcademia--100.00FalseFalse--
-Tool missed reservation---30.00TrueFalse--
Atomic Layer DepositionTool group trainingInternal--30.00FalseFalse--
Atomic Layer DepositionTool group trainingIndustry--120.00FalseFalse--
Atomic Layer DepositionTool group trainingAcademia--60.00FalseFalse--
Atomic Layer DepositionTool individual trainingInternal--60.00FalseFalse--
Atomic Layer DepositionTool individual trainingIndustry--240.00FalseFalse--
Atomic Layer DepositionTool individual trainingAcademia--120.00FalseFalse--
Atomic Layer DepositionTool usageInternal03/13/2026-60.00FalseFalse30.0015.00
Atomic Layer DepositionTool usageIndustry--240.00FalseFalse--
Atomic Layer DepositionTool usageAcademia--120.00FalseFalse--
PECVDTool usageAcademia--50.00FalseFalse-30.00

14 rates

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